3D003 Category 3D
'Computational lithography' “software” “specially designed” for the “development” of patterns on “EUV”-lithography masks or reticles.
Category 3: Electronics
Reasons for control
- NS: National security
- AT: Anti-terrorism
Country chart
List-based license exceptions
| Exception | As stated in the entry |
|---|---|
| TSR | Yes |
Items
- The list of items controlled is contained in the ECCN heading.
Related controls
N/A
Source: eCFR, version
2026-08-01, retrieved
2026-08-20T04:04:59+00:00.